HPGR-400&800 Series
Overview
Applications
Ultra High Pure Gas Line
Semiconductor Hook-Up Line
Bulk Gas Line
Features
Metal to Metal Diaphragm Seals Leak Tight Integrity
Internal Surface EP 10 Ra or 5 Ra micro-inch
All Performed in Class 10 Clean Room
Specifications
Maximum Inlet Pressure :
600psig (41bar)
Outlet Pressure Range :
0-60psig (0-4bar), 0-100psig (0-7bar),
0-150psig (0-10bar), 0-250psig (0-17bar)
Operating Temperature Range :
-15℉ (-26℃) to 176℉ (80℃)
Ultra High Pure Gas Line Semiconductor Hook-Up Line Bulk Gas Line
FeaturesMetal to Metal Diaphragm Seals Leak Tight Integrity Internal Surface EP 10 Ra or 5 Ra micro-inch All Performed in Class 10 Clean Room
SpecificationsMaximum Inlet Pressure : 600psig (41bar) Outlet Pressure Range : 0-60psig (0-4bar), 0-100psig (0-7bar), 0-150psig (0-10bar), 0-250psig (0-17bar) Operating Temperature Range : -15℉ (-26℃) to 176℉ (80℃)
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